Electro-migration barrier for interconnect

ABSTRACT

The present disclosure relates to an integrated circuit. The integrated circuit includes a conductive interconnect disposed on a dielectric over a substrate. An interfacial layer is arranged along an upper surface of the conductive interconnect. A liner is arranged along a lower surface of the conductive interconnect. The liner and the interfacial layer surround the conductive interconnect. A middle layer is located over the interfacial layer and has a bottommost surface over the dielectric. A bottommost surface of the interfacial layer and the bottommost surface of the middle layer are both above a top of the conductive interconnect.

CROSS-REFERENCE TO RELATED APPLICATIONS

This application is a Continuation of U.S. application Ser. No.17/104,534, filed on Nov. 25, 2020, which is a Continuation of U.S.application Ser. No. 16/227,062, filed on Dec. 20, 2018 (now U.S. Pat.No. 10,867,920, issued on Dec. 15, 2020), which is a Divisional of U.S.application Ser. No. 15/343,393, filed on Nov. 4, 2016 (now U.S. Pat.No. 10,163,795, issued on Dec. 25, 2018), which is a Continuation ofU.S. application Ser. No. 13/967,596, filed on Aug. 15, 2013 (now U.S.Pat. No. 9,490,209, issued on Nov. 8, 2016), which claims the benefit ofU.S. Provisional Application No. 61/778,674, filed on Mar. 13, 2013. Thecontents of the above-referenced patent applications are herebyincorporated by reference in their entirety.

FIELD

The present disclosure relates to integrated circuit devices and methodsfor manufacturing them.

BACKGROUND

Many years of research have been devoted to reducing the criticaldimensions (CDs) and structure densities of integrated circuits (ICs).As densities have increased, the resistance capacitance (RC) delay timehas become a limiting factor in circuit performance. RC delay can bereduced by using copper in place of aluminum for metal interconnectstructures. RC delay can also be reduced by using low-k or extremelylow-k dielectrics.

Electro-migration can cause copper to diffuse into adjacent structuresand create voids within copper lines. Electro-migration is typicallymitigated using diffusion barriers. Diffusion barriers are generallyprovided between copper and adjacent structures. A variety of diffusionbarrier materials have been used. Examples of conductive barriermaterials include compounds of transition metals such as tantalumnitride, titanium nitride, and tungsten nitride. Examples of dielectricdiffusion barrier materials include silicon nitride, silicon oxynitride,and silicon carbide.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a flow chart of an example process according to an embodimentof the present disclosure.

FIG. 2 is a schematic illustration of a semiconductor device accordingto an embodiment of the present disclosure.

FIG. 3 is a schematic illustration of a semiconductor device accordingto another embodiment of the present disclosure.

FIG. 4 is a schematic illustration of a semiconductor device includingthe interconnect structure used in the embodiments of FIGS. 2 and 3 .

FIG. 5 is a flow chart of an alternate process as used in some otherembodiments to form a metal interconnect structure.

FIG. 6 is a schematic illustration of a semiconductor device includingan example interconnect structure formed by the process of FIG. 5 .

FIG. 7 is a schematic illustration of a semiconductor device accordingto some embodiments that use the interconnect structure of FIG. 6 .

FIG. 8 is a schematic illustration of the semiconductor device of FIG. 7after further processing.

FIG. 9 is a schematic illustration of a semiconductor device includinganother example interconnect structure.

FIG. 10 is a schematic illustration of a semiconductor device accordingto some embodiments that use the interconnect structure of FIG. 9 .

FIG. 11 is a schematic illustration of a semiconductor device accordingto some other embodiments that use the interconnect structure of FIG. 9.

DETAILED DESCRIPTION

The present disclosure provides integrated circuit devices and methodsof forming them. The devices include a dielectric barrier layer formedover a copper-containing metal interconnect structure. The dielectricbarrier layer inhibits electro-migration of Cu. The dielectric barrierlayer includes a metal-containing layer that forms an interface with thecopper-containing metal of the interconnect structure. Incorporatingmetal within the interfacial layer improves adhesion of the dielectricbarrier layer to copper lines and the like and provides superiorelectro-migration resistance over the operating lifetime of the devices.

FIG. 1 is a flow chart of an example process 100 according to anembodiment of the present disclosure. The process 100 begins with aseries of actions 110 that form a metal interconnect with exposedcopper-containing metal. The next series of actions 120 form adielectric barrier layer over the exposed copper. Additional processing130 can follow, and typically includes forming structures such asadditional metal interconnect layers over the dielectric barrier layer.

FIG. 2 is a schematic illustration of an integrated circuit device 200,which is an embodiment of the present disclosure and an example of thetype of device that can be produced by the process 100. The device 200includes metal lines 204 formed within a matrix of dielectric 202. Thedielectric 202 is formed over a substrate 201. Trench liner 203 providesa barrier between the conductive lines 204 and the dielectric 202. Adielectric barrier layer 208 is formed over the conductive lines 204.The dielectric barrier layer 208 includes a metal-containing interfaciallayer 205, a middle layer 206, and an upper layer 207. In someembodiments, the middle layer 206 is not required and is excluded. Insome embodiments, neither the middle layer 206 or the upper layer 207 isrequired, and both are excluded.

In the device 200, the interfacial layer 205 has been formed by aselective deposition process, whereby the interfacial layer 205 isformed above the upper surface 209 of metal lines 204 but not above theupper surface 210 of dielectric 202. In some embodiments, theinterfacial layer 205 is formed by a non-selective deposition process,whereby the interfacial layer 205 is formed above both the upper surface209 of metal lines 204 and the upper surface 210 of dielectric 202. FIG.3 is a schematic illustration of an integrated circuit device 300, whichis an example of such embodiments.

The metal interconnect can be formed by any suitable process. Suitableprocesses for forming the metal interconnect include, withoutlimitation, damascene and dual damascene processes. Thecopper-containing metal 204 may be exposed at an intermediate stage ofthe damascene or dual damascene process. In the example process 100illustrated by FIG. 1 , the actions 110 that form a metal interconnectwith exposed copper-containing metal 204 include: action 111, providingthe substrate 201; action 112, forming a layer of dielectric 202 overthe substrate 201; action 113, forming trenches within the dielectric202; action 114, lining the trenches with trench liner 203; action 115,filling the trenches with copper-containing metal 204 to form metallines; and action 116, planarization such as chemical mechanicalpolishing 116. FIG. 4 provides an example of the device 200 at thisstage of manufacture.

FIG. 5 provides a flow chart for a process 210, which is another processthat can be used for forming the metal interconnect. The process 210 issimilar to the process 110 except for action 212, which forms a dummylayer that temporarily takes the place of all or part of the matrix ofdielectric 202 within which conductive lines 204 are inlaid. The dummylayer is later removed with action 217. FIG. 6 provides a schematicillustration of a device 400 at the conclusion of process 210. FIG. 7provides a schematic illustration of the device 400 after applying theprocess 120 to form the dielectric barrier layer 208. If the dielectricbarrier layer 208 includes the upper layer 207 as illustrated in FIG. 7, the dielectric barrier layer 208 for the device 400 forms to the sides212 as well as above the upper surface 209 of the conductive lines 204.As illustrated by FIG. 8 , after further processing 130, the dielectric202 forms a matrix within which conductive lines 204 are inlaid.

The process 210 of FIG. 5 is illustrative of embodiments in which metallines 204 are formed before the surrounding matrix of dielectric 202. Anadvantage of forming the metal lines 204 first is avoiding damage orcontamination of the surrounding dielectric 202 during processing thatforms the metal lines 204. This can be particularly useful when thedielectric 202 includes an extremely low-k dielectric. Extremely low-kdielectrics are particularly susceptible to such damage orcontamination.

Some embodiments employ a variation of process 210 in which lining thetrenches, action 114, is skipped. FIG. 9 is a schematic illustration ofa device 500 that provides an example of the resulting metalinterconnect structure formed by this modified process 210. FIG. 10provides an example of the resulting structure after applying theactions 120 that form the dielectric barrier layer 208 to the device 500as illustrated in FIG. 9 . The device 500 of FIG. 10 illustrates thecase in which the interfacial layer 205 is formed by a selectivedeposition process 121. The device 600 illustrated by FIG. 11illustrates the case in which the interfacial layer 205 is formed by anon-selective deposition process 121. In either case, the interfaciallayer 205 forms to the sides 212 as well as on the upper surface 209 ofthe conductive lines 204. This can be advantageous when the dielectricbarrier layer 208 provides superior resistance to electro-migration ascompared to the trench liner 203.

The process 120 of forming the dielectric barrier layer 208 in FIG. 1begins with action 121, forming the interfacial layer 205. In someembodiments, action 121 is a selective deposition process. In otherembodiments, action 121 is a non-selective deposition process. In thepresent context, selective or non-selective is in relation to theexposed surfaces of copper-containing metal 204. Although theinterfacial layer 205 contains metal, the interfacial layer 205 can be adielectric. When the interfacial layer 205 is deposited by anon-conformal deposition process, a dielectric quality for theinterfacial layer 205 is desirable to prevent bridging betweenconductive lines 204.

The composition of the interfacial layer 205 is selected to provide goodadhesion to copper-containing metal lines 204 and stable protectionagainst electro-migration. These properties can be provided by acomposition having the formula M_(x)O_(y)N_(z) where M is a metal, O isoxygen, and N is nitrogen. Generally, the metal is selected from thegroup consisting of Al, Mn, Co, Ti, Ta, W, Ni, Sn, Mg, and combinationsthereof. In some embodiments, the interfacial layer 205 is a dielectric,x is in the range from 20 to 70%, y is in the range from 0-80%, z is inthe range from 0-80%, and the sum of y and z is at least 30%. In someembodiments in which the interfacial layer 205 is deposited conformally,x is in the range from 40-100%, y is in the range from 0-60%, and z isin the range from 0-60%. Specific examples for the composition of theinterfacial layer 205 include Co and AlN.

The thickness of the interfacial layer 205 can be in the range from 5 Åto 100 Å. In embodiments where the dielectric barrier layer 208 does notinclude the upper layer 207, the thickness is typically in the rangefrom 20 Å to 100 Å. In embodiments where the dielectric barrier layer208 includes the upper layer 207, the thickness is typically in therange from 5 Å to 50 Å.

The interfacial layer 205 can be formed by any suitable process.Examples of suitable processes for selective deposition of theinterfacial layer 205 include, without limitation, electroplating andelectroless plating. Examples of suitable processes for non-conformaldeposition of the interfacial layer 205 include, without limitation,physical vapor deposition (PVD), chemical vapor deposition (CVD), andsputtering. As a specific example, the interfacial layer 205 can beformed by plasma-enhanced chemical vapor deposition (PECVD).

The process 120 of forming the dielectric barrier layer 208 continueswith action 122, forming the middle layer 206. In some embodiments, themiddle layer 206 is excluded. In other embodiments, the middle layer 206is included within the dielectric barrier layer 208 to improve overallperformance of the dielectric barrier layer 208 in preventingelectro-migration.

The middle layer 206 is a dielectric having a composition selected toprovide an effective barrier to the diffusion of copper. Suitablecompositions for the middle layer 206 include, for example, SiN, SiC,SiCO and SiCN. The thickness of the middle layer 206 is typically in therange from 10 Å to 200 Å.

The middle layer 206 can be formed by any suitable process. Examples ofprocesses that can be suitable for forming the middle layer 206 include,without limitation, physical vapor deposition (PVD), chemical vapordeposition (CVD), and sputtering. As a specific example, the middlelayer 206 can be formed by plasma-enhanced chemical vapor deposition(PECVD).

The process 120 of forming the dielectric barrier layer 208 continueswith action 123, forming the upper layer 207. In some embodiments, boththe middle layer 206 and the upper layer 207 are excluded. Inembodiments that include the middle layer 206, the upper layer 207 isgenerally superior to the middle layer 206 in terms of suitability forfunctioning as an etch stop layer. In embodiments that do not includethe middle layer 206, and in some other embodiments as well, the upperlayer 207 is included within the dielectric barrier layer 208 to improveoverall performance of the dielectric barrier layer 208 in preventingelectro-migration.

The upper layer 207 is a dielectric. The composition of the upper layer207 can be selected to provide an effective barrier to the diffusion ofcopper. The composition of the upper layer 207 can also be selected toprovide an etch stop layer for use during further process 130. Suitablecompositions for the upper layer 207 include, for example, SiN, SiC,SiCN, SiON, and SiCON. The thickness of the upper layer 207 is typicallyin the range from 50 Å to 500 Å. As a specific example, the upper layer207 can be SiCN while the middle layer 206 is SiN.

The upper layer 207 can be formed by any suitable process. Examples ofprocesses that can be suitable for forming the upper layer 207 include,without limitation, physical vapor deposition (PVD), chemical vapordeposition (CVD), and sputtering. As a specific example, the upper layer207 can be formed by plasma-enhanced chemical vapor deposition (PECVD).

The process 100 continues with further process 130. Further processingcan include any steps necessary to complete formation of the device 100.In some embodiments, further processing includes at least action 161,forming a low-k dielectric layer over the dielectric barrier layer 208.This can be the low-k dielectric layer 203 that forms a matrix withinwhich the conductive lines 204 are inlaid or the dielectric matrix foranother overlying metal interconnect layer. The dielectric barrier layer208 can be functional to mitigate electro-migration of copper fromconductive lines 204 into the overlying low-k dielectric.

Copper-containing metal 204 can be copper or a conductive copper alloy.In some embodiments, metal 204 is copper as that term is used for copperinterconnects in the semiconductor industry. In that context, copper isa metal formed primarily of copper atoms, but can be copper that isalloyed, doped, or otherwise impure.

The substrate 201 can be any suitable substrate. In most embodiments,the substrate 201 includes a semiconductor. Examples of semiconductorsinclude, without limitation, silicon, silicon on insulator (SOI), Ge,SiC, GaAs, GaAlAs, InP, GaN SiGe. In some embodiments, the substrate 201includes device formed during front-end-of-line processing. Devicestructures that can be formed during FEOL processing include, withoutlimitation, memory devices, logical devices, FETs and components thereofsuch as source regions, drain regions, and gate electrodes, activedevices, passive devices, and combinations thereof. The substrate 201can also include insulators, conductors, and interconnect structures,including structures formed during back-end of line (BEOL) processing.

The dielectric 203 can include one or more layers of low-k dielectrics.A low-k dielectric is a material having a dielectric constant lower thanthat of silicon dioxide. Examples of low-k dielectrics includeorganosilicate glasses (OSG) such as carbon-doped silicon dioxide,fluorine-doped silicon dioxide (otherwise referred to as fluorinatedsilica glass (or FSG), and organic polymer low-k dielectrics. Examplesof organic polymer low-k dielectrics include polyarylene ether,polyimide (PI), benzocyclobutene, and amorphous polytetrafluoroethylene(PTFE). A low-k dielectric can be applied by any suitable means,including for example, spin coating or CVD.

An extremely low-k dielectric is a material having a dielectric constantof about 2.1 or less. An extremely low-k dielectric can be formed bydeposition of a low-k dielectric in such a manner that it has porosityor air-gaps, whereby the effective dielectric constant of the compositeincluding pores and air gaps is 2.1 or less.

The present disclosure describes an integrated circuit device includinga substrate, a copper-containing conductive line formed above thesubstrate, and a dielectric barrier layer above and in contact with thecopper-containing conductive line. The dielectric barrier layer includesan interfacial layer that forms the interface between the dielectricbarrier layer and the copper-containing conductive line. The interfaciallayer has an atomic fraction of metal that is at least 20%.

The present disclosure describes a method of forming an integratedcircuit device. The method includes forming a copper-containingconductive line over a substrate and forming a dielectric barrier layerover the copper-containing conductive line. The dielectric barrier layerincludes at least a lower layer that is in contact with thecopper-containing conductive line. The dielectric barrier layer includesan interfacial layer that forms an interface between the dielectricbarrier layer and the copper-containing conductive line. The interfaciallayer has an atomic fraction of metal that is at least 20%.

In some embodiments, the present disclosure relates to an integratedcircuit device. The integrated circuit device comprises a substrate, anda conductive metal interconnect line arranged within a dielectricmaterial disposed over the substrate. An interfacial layer is in contactwith an upper surface of the conductive metal interconnect line. Anupper dielectric layer is arranged over the interfacial layer. A middledielectric layer is arranged between the upper dielectric layer and theinterfacial layer.

In other embodiments, the present disclosure relates to an integratedcircuit device. The integrated circuit device comprises a conductivemetal interconnect line arranged within an inter-level dielectricmaterial. An interfacial layer extends over an upper surface of theconductive metal interconnect line, and a liner is arranged along one ormore surfaces of the conductive metal interconnect line not contactingthe interfacial layer. A second dielectric layer overlies theinterfacial layer and the liner. A second inter-level dielectricmaterial laterally surrounds the second dielectric layer.

In yet other embodiments, the present disclosure relates to anintegrated circuit device. The integrated circuit device comprises asubstrate, and a conductive metal interconnect line arranged within adielectric material disposed over the substrate. An interfacial layer isin contact with an upper surface of the conductive metal interconnectline. The interfacial layer has a planar lower surface contacting theconductive metal interconnect line. A liner is arranged along one ormore surfaces of the conductive metal interconnect line not contactingthe interfacial layer.

The components and features of the present disclosure have been shownand/or described in terms of certain embodiments and examples. While aparticular component or feature, or a broad or narrow formulation ofthat component or feature, may have been described in relation to onlyone embodiment or one example, all components and features in eithertheir broad or narrow formulations may be combined with other componentsor features to the extent such combinations would be recognized aslogical by one of ordinary skill in the art.

1. An integrated circuit, comprising: a conductive interconnect disposedon a dielectric over a substrate; an interfacial layer arranged along anupper surface of the conductive interconnect; a liner arranged along alower surface of the conductive interconnect, wherein the liner and theinterfacial layer surround the conductive interconnect; a middle layerlocated over the interfacial layer and having a bottommost surface overthe dielectric; and wherein a bottommost surface of the interfaciallayer and the bottommost surface of the middle layer are both above atop of the conductive interconnect.
 2. The integrated circuit of claim1, further comprising: an upper layer over the middle layer, wherein theupper layer has a protrusion protruding outward from an upper surface ofthe upper layer and overlying the interfacial layer.
 3. The integratedcircuit of claim 1, wherein the bottommost surface of the interfaciallayer is substantially co-planar with the bottommost surface of themiddle layer.
 4. The integrated circuit of claim 1, wherein theinterfacial layer has opposing outermost sidewalls that are directlyabove a bottommost surface of the liner.
 5. The integrated circuit ofclaim 1, wherein the interfacial layer vertically separates thebottommost surface of the middle layer from a top of the dielectric. 6.The integrated circuit of claim 1, wherein the interfacial layervertically separates the bottommost surface of the middle layer from thetop of the conductive interconnect.
 7. The integrated circuit of claim1, wherein the interfacial layer is formed by a selective depositionprocess that confines an entirety of the interfacial layer directly overthe conductive interconnect.
 8. The integrated circuit of claim 1,wherein the interfacial layer is a dielectric material that contains ametal and oxygen; wherein the liner includes a low-k dielectricmaterial; and wherein the middle layer includes silicon nitride, siliconcarbide, silicon oxy-carbide, or silicon carbon nitride.
 9. Anintegrated circuit, comprising: a conductive interconnect disposed overa substrate, wherein the conductive interconnect is directly above anuppermost surface of a dielectric; an interfacial layer arranged along atop surface of the conductive interconnect; a liner arranged along alower surface of the conductive interconnect, wherein the liner and theinterfacial layer surround the conductive interconnect; and a middlelayer disposed over the interfacial layer and contacting sidewalls and atop surface of the liner, wherein the middle layer vertically extendsfrom over the top surface of the conductive interconnect to below abottom of the conductive interconnect.
 10. The integrated circuit ofclaim 9, wherein the middle layer comprises a plurality of lowersurfaces facing the substrate and disposed vertically above the topsurface of the liner.
 11. The integrated circuit of claim 9, wherein themiddle layer comprises an interior corner formed by adjacent surfaces ofthe middle layer, the adjacent surfaces of the middle layer beingseparated by a first angle measured through the middle layer and by alarger second angle measured outside of the middle layer.
 12. Theintegrated circuit of claim 9, wherein the middle layer comprises astepped cross-sectional profile.
 13. The integrated circuit of claim 9,wherein the middle layer is directly between adjacent surfaces of theliner and the interfacial layer.
 14. The integrated circuit of claim 9,wherein a straight line extending between a surface of the liner and asurface of the interfacial layer intersects a part of the middle layer.15. The integrated circuit of claim 9, further comprising: an upperlayer over the middle layer; and an inter-level dielectric (ILD) layerlaterally and directly between sidewalls of the upper layer.
 16. Anintegrated circuit, comprising: a conductive interconnect disposed on adielectric over a substrate; an interfacial layer arranged along anupper surface of the conductive interconnect; a liner having a topmostsurface below a bottommost surface of the conductive interconnect,wherein the liner and the interfacial layer surround the conductiveinterconnect; and a middle layer located over the interfacial layer andalong sidewalls of the interfacial layer.
 17. The integrated circuit ofclaim 16, wherein the middle layer covers opposing outermost sidewallsof the liner.
 18. The integrated circuit of claim 16, wherein the middlelayer and the liner have bottommost surfaces that physically contact anupper surface of the dielectric.
 19. The integrated circuit of claim 16,wherein the topmost surface of the liner extends between opposingoutermost sidewalls of the liner.
 20. The integrated circuit of claim16, further comprising: an upper layer over the middle layer; and anupper dielectric layer continuously extending from over the upper layerto along sidewalls of the upper layer.